Capres: Core subsystems for metrology tool

In close cooperation with Capres, DANSK TEKNOLOGI has developed core subsystems for microRSP A300 Tool - a unique automatic metrology tool for in-line quality control of processes in the semiconductor industry.  

The metrology equipment is the ground-breaking and leading metrology tool for in-line measurements of sheet resistance, essential for the semiconductor manufacturing industry.

The tool has been developed with DANSK TEKNOLOGI as the lead technical advisor and developer of key custom mechanics.

Task
DANSK TEKNOLOGI has been responsible for (1) concept development, (2) manufacturing of prototypes, (3) tests of prototypes, (4) installation and initialisation of prototypes, and (5) delivery of subsystems in series production. 

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